課程概述 |
Advanced Fabrication and Characterization Techniques, Spring 2005
The subjects to be discussed in the course include the following:
(1.) Principles & Practice of Nanofabrication
i. Photon, Electron, & Ion Lithography
ii. Proximity Probe & Imprinting Lithography
iii. Molecular Beam Epitaxy & Chemical Vapor Deposition
iv. Particle Self-organization, self-assembly
(2.) Principles & Practice of Nanoanalysis
i. Mass Spectrometry
ii. Photon & Electron Diffraction Techniques
iii. Photon, Electron, & Ion Microscopy
iv. Scanning Proximity Probe Microscopy
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